MEMS Flow Sensor-MSL01

MEMS Flow Sensor-MSL01

分类： Sensors 品牌： HKHONM

描述
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描述

Parameter	Description	Conditions	Min	Typ	Max	Unit
Flow Range	Gas measurement range	1atm, 25℃ ambient	0.01	–	10	m/s
RA	Ambient temp sensor resistance	Pins 1&2, +25℃	2700	3000	3300	Ω
RH	Heater temperature resistance	Pins 5&6, +25℃	198	220	242	Ω
RUE	Upstream external temp sensor resistance	Pins 4&8, +25℃	1440	1600	1760	Ω
RUI	Upstream internal temp sensor resistance	Pins 3&7, +25℃	1440	1600	1760	Ω
RDI	Downstream internal temp sensor resistance	Pins 3&4, +25℃	1440	1600	1760	Ω
ROE	Downstream external temp sensor resistance	Pins 7&8, +25℃	1440	1600	1760	Ω
TCR	Pt resistance temperature coefficient	-40℃~125℃	0.218	0.230	0.253	%/°C
RH Limit Current	No flow, 25℃ ambient	Pins 5&6	–	–	15	mA

Category	Specification
Performance	Wide span ratio >300:1
	Fast response <5ms
	Ultra-low startup flow <0.05 m/s
	High accuracy (±3% reading)
Design	No moving parts → High reliability
	Suitable for clean gases & liquids
Applications	Medical respiratory/diagnostic equipment
	Fuel cell control
	Automotive airflow meters
	Domestic gas appliances
	GC/MS systems
	HVAC systems
	Leak detection
	Industrial automation

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